Abdennour Abbas, Philippe Supiot, Vianney Mille, Didier Guillochon, Bertrand Bocquet. Capillary microchannel fabrication using plasma polymerized TMDS for fluidic MEMS technology.
Journal of Micromechanics and Microengineering, IOP Publishing, 2009, 19, pp.045022.
⟨ird-00403290⟩